Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142509 | Electrostatic chuck with seal surface | Patrick Breiling, Michael Philip Roberts, Chloe Baldasseroni, Adrien LaVoie, Ramesh Chandrasekharan | 2024-11-12 |
| 12077859 | Variable cycle and time RF activation method for film thickness matching in a multi-station deposition system | Kiyong Cho, Adrien LaVoie, Jaswinder Guliani, Purushottam Kumar, Jun Qian | 2024-09-03 |
| 11970772 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Jun Qian, Hu Kang, Fung Suong Ou | 2024-04-30 |
| 11864372 | Line bending control for memory applications | Gorun Butail, Shruti Vivek Thombare, Patrick A. Van Cleemput | 2024-01-02 |