Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142509 | Electrostatic chuck with seal surface | Patrick Breiling, Chloe Baldasseroni, Ishtak Karim, Adrien LaVoie, Ramesh Chandrasekharan | 2024-11-12 |
| 12110586 | Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers | Adrien LaVoie, Chloe Baldasseroni, Richard Phillips, Ramesh Chandrasekharan | 2024-10-08 |
| 12071689 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Ramesh Chandrasekharan, Pulkit Agarwal, Adrien LaVoie, Ravi Kumar, Nuoya Yang +2 more | 2024-08-27 |