Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125705 | Method for providing doped silicon using a diffusion barrier layer | Purushottam Kumar, Gengwei Jiang, Bart J. van Schravendijk, Tengfei Miao, Adrien LaVoie | 2024-10-22 |
| 12087574 | Oxidative conversion in atomic layer deposition processes | Douglas Walter Agnew, Bart J. van Schravendijk | 2024-09-10 |
| 12049699 | Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching | Purushottam Kumar, Bart J. van Schravendijk, Adrien LaVoie | 2024-07-30 |
| 12020923 | Low-κ ALD gap-fill methods and material | Douglas Walter Agnew, Adrien LaVoie, Ian John Curtin, Purushottam Kumar | 2024-06-25 |