Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12157945 | Thermal atomic layer deposition of silicon-containing films | Awnish Gupta, Tengfei Miao, Adrien LaVoie, Ian John Curtin | 2024-12-03 |
| 12087574 | Oxidative conversion in atomic layer deposition processes | Joseph R. Abel, Bart J. van Schravendijk | 2024-09-10 |
| 12020923 | Low-κ ALD gap-fill methods and material | Joseph R. Abel, Adrien LaVoie, Ian John Curtin, Purushottam Kumar | 2024-06-25 |