Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062554 | Progressive heating of components of substrate processing systems using TCR element-based heaters | Ramesh Chandrasekharan | 2024-08-13 |
| 11955366 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2024-04-09 |