Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136938 | Closed-loop multiple-output radio frequency (RF) matching | Eller Y. Juco | 2024-11-05 |
| 12052006 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni | 2024-07-30 |
| 12040770 | Multiple-output radiofrequency matching module and associated methods | Sunil Kapoor, Bradford J. Lyndaker | 2024-07-16 |
| 11996301 | Modular-component system for gas delivery | John F. Stumpf, Damien Long, Norman Nakashima | 2024-05-28 |
| 11984298 | Impedance transformation in radio-frequency-assisted plasma generation | Eller Y. Juco, Thomas Frederick, Paul Konkola | 2024-05-14 |
| 11955366 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2024-04-09 |
| 11862435 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Mohamed Sabri | 2024-01-02 |