Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862435 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Karl Leeser | 2024-01-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862435 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Karl Leeser | 2024-01-02 |