Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908715 | Dynamic temperature control of substrate support in substrate processing system | Sairam Sundaram, Ramesh Chandrasekharan | 2024-02-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908715 | Dynamic temperature control of substrate support in substrate processing system | Sairam Sundaram, Ramesh Chandrasekharan | 2024-02-20 |