Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823903 | Method for processing workpiece | Toru Hisamatsu, Tomoyuki Oishi | 2023-11-21 |
| 11798793 | Substrate processing method, component processing method, and substrate processing apparatus | Satoshi OHUCHIDA, Koki MUKAIYAMA, Yusuke WAKO, Maju TOMURA | 2023-10-24 |
| 11728166 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Maju TOMURA, Hironari Sasagawa | 2023-08-15 |
| 11658036 | Apparatus for processing substrate | Masahiro Tabata | 2023-05-23 |
| 11637003 | Method for etching film and plasma processing apparatus | Tomohiko NIIZEKI, Takayuki Katsunuma, Maju TOMURA | 2023-04-25 |
| 11615964 | Etching method | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2023-03-28 |
| 11600501 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2023-03-07 |
| 11557485 | Plasma processing method and plasma processing apparatus | Toru Hisamatsu, Kensuke Taniguchi, Yoshinari Hatazaki | 2023-01-17 |
| 11551937 | Etching method | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2023-01-10 |