Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823903 | Method for processing workpiece | Yoshihide Kihara, Tomoyuki Oishi | 2023-11-21 |
| 11594422 | Film etching method for etching film | Takayuki Hoshi, Masanobu Honda, Masahiro Tabata | 2023-02-28 |
| 11557485 | Plasma processing method and plasma processing apparatus | Yoshihide Kihara, Kensuke Taniguchi, Yoshinari Hatazaki | 2023-01-17 |
| 11545355 | Substrate processing method and substrate processing apparatus | Kae KUMAGAI, Masanobu Honda | 2023-01-03 |