Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735423 | Workpiece processing method | — | 2023-08-22 |
| 11658036 | Apparatus for processing substrate | Yoshihide Kihara | 2023-05-23 |
| 11637025 | Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxide | Sho Kumakura | 2023-04-25 |
| 11594422 | Film etching method for etching film | Takayuki Hoshi, Masanobu Honda, Toru Hisamatsu | 2023-02-28 |
| 11574806 | Film forming method | Sho Kumakura | 2023-02-07 |
| 11574814 | Substrate and substrate processing method | Masahiro Tadokoro | 2023-02-07 |