Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728176 | Treatment method | Kiyohito Ito, Shinya Morikita, Kensuke Taniguchi, Michiko Nakaya | 2023-08-15 |
| 11699614 | Film deposition method and plasma processing apparatus | Michiko Nakaya | 2023-07-11 |
| 11651971 | Etching method, substrate processing apparatus, and substrate processing system | Kenta ONO, Shinya Ishikawa | 2023-05-16 |
| 11594422 | Film etching method for etching film | Takayuki Hoshi, Masahiro Tabata, Toru Hisamatsu | 2023-02-28 |
| 11545355 | Substrate processing method and substrate processing apparatus | Kae KUMAGAI, Toru Hisamatsu | 2023-01-03 |