Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651971 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Masanobu Honda | 2023-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651971 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Masanobu Honda | 2023-05-16 |