Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728176 | Treatment method | Kiyohito Ito, Kensuke Taniguchi, Michiko Nakaya, Masanobu Honda | 2023-08-15 |
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Fumiya TAKATA, Toshikatsu TOBANA, Kazunobu Fujiwara, Jun Abe +1 more | 2023-02-28 |
| 11569094 | Etching method and plasma processing apparatus | Kota ISHIHARADA, Fumiya TAKATA, Toshikatsu TOBANA | 2023-01-31 |
| 11545364 | Pulsed capacitively coupled plasma processes | Peter Ventzek, Alok Ranjan, Kensuke Taniguchi | 2023-01-03 |