Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Fumiya TAKATA, Toshikatsu TOBANA, Shinya Morikita, Jun Abe +1 more | 2023-02-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Fumiya TAKATA, Toshikatsu TOBANA, Shinya Morikita, Jun Abe +1 more | 2023-02-28 |