Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Toshikatsu TOBANA, Shinya Morikita, Kazunobu Fujiwara, Jun Abe +1 more | 2023-02-28 |
| 11569094 | Etching method and plasma processing apparatus | Kota ISHIHARADA, Toshikatsu TOBANA, Shinya Morikita | 2023-01-31 |