Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814748 | Method for producing lithium tantalate single crystal substrate | Koji Kato | 2023-11-14 |
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Fumiya TAKATA, Toshikatsu TOBANA, Shinya Morikita, Kazunobu Fujiwara +1 more | 2023-02-28 |