Issued Patents 2023
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832373 | Plasma processing apparatus | Yohei Yamazawa, Takehisa Saito, Mayo UDA, Keigo Toyoda, Toshiki Nakajima | 2023-11-28 |
| 11817295 | Three-phase pulsing systems and methods for plasma processing | Peter Ventzek, Mitsunori Ohata | 2023-11-14 |
| 11734783 | System and method for detecting on-street parking violations | Prasant Kumar MISRA, Arunchandar Vasan, Krishna Kumar Sunil Komdam, Anand Sivasubramaniam | 2023-08-22 |
| 11699741 | Metal-containing liner process | Yusuke Yoshida, Sergey Voronin, Christopher Talone | 2023-07-11 |
| 11688586 | Method and apparatus for plasma processing | Peter Ventzek | 2023-06-27 |
| 11658037 | Method of atomic layer etching of oxide | Sonam D. Sherpa | 2023-05-23 |
| 11605542 | Method for dry etching compound materials | Peter Ventzek | 2023-03-14 |
| 11605539 | Defect correction on metal resists | Yun Han, Peter L. G. Ventzek | 2023-03-14 |
| 11557487 | Etching metal during processing of a semiconductor structure | Roberto C. Longo Pazos, Peter Ventzek | 2023-01-17 |
| 11545364 | Pulsed capacitively coupled plasma processes | Peter Ventzek, Kensuke Taniguchi, Shinya Morikita | 2023-01-03 |