MO

Mitsunori Ohata

TL Tokyo Electron Limited: 2 patents #121 of 865Top 15%
📍 Taiwa, MA: #1 of 1 inventorsTop 100%
Overall (2023): #125,476 of 537,848Top 25%
2
Patents 2023

Issued Patents 2023

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11817295 Three-phase pulsing systems and methods for plasma processing Peter Ventzek, Alok Ranjan 2023-11-14
11798787 Plasma processing apparatus and plasma processing method Naoki Fujiwara, Takahiro Takeuchi 2023-10-24