Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830709 | Broadband plasma processing systems and methods | Jianping Zhao | 2023-11-28 |
| 11817295 | Three-phase pulsing systems and methods for plasma processing | Alok Ranjan, Mitsunori Ohata | 2023-11-14 |
| 11773484 | Hard mask deposition using direct current superimposed radio frequency plasma | Jianping Zhao, Toshihiko Iwao | 2023-10-03 |
| 11688586 | Method and apparatus for plasma processing | Alok Ranjan | 2023-06-27 |
| 11605542 | Method for dry etching compound materials | Alok Ranjan | 2023-03-14 |
| 11605536 | Cyclic low temperature film growth processes | Jianping Zhao, Toshihiko Iwao | 2023-03-14 |
| 11557487 | Etching metal during processing of a semiconductor structure | Roberto C. Longo Pazos, Alok Ranjan | 2023-01-17 |
| 11551909 | Ultra-localized and plasma uniformity control in a plasma processing system | Barton Lane | 2023-01-10 |
| 11545364 | Pulsed capacitively coupled plasma processes | Alok Ranjan, Kensuke Taniguchi, Shinya Morikita | 2023-01-03 |