Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817296 | RF voltage and current (V-I) sensors and measurement methods | Merritt Funk, Yohei Yamazawa, Justin Moses, Chelsea DuBose, Michael Hummel | 2023-11-14 |
| 11600474 | RF voltage and current (V-I) sensors and measurement methods | Merritt Funk, Yohei Yamazawa, Justin Moses, Chelsea DuBose, Michael Hummel | 2023-03-07 |
| 11551909 | Ultra-localized and plasma uniformity control in a plasma processing system | Peter Ventzek | 2023-01-10 |