Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817296 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Merritt Funk, Yohei Yamazawa, Justin Moses, Chelsea DuBose | 2023-11-14 |
| 11600474 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Merritt Funk, Yohei Yamazawa, Justin Moses, Chelsea DuBose | 2023-03-07 |
| 11545302 | Mold for forming a radio frequency (RF) coil for a plasma processing apparatus | — | 2023-01-03 |