Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817296 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Yohei Yamazawa, Justin Moses, Chelsea DuBose, Michael Hummel | 2023-11-14 |
| 11728135 | Electric pressure systems for control of plasma properties and uniformity | Jianping Zhao, Lee Chen, Zhiying Chen | 2023-08-15 |
| 11721524 | Power generation systems and methods for plasma stability and control | Chelsea DuBose, Justin Moses, Kazuki Moyama, Kazushi Kaneko | 2023-08-08 |
| 11600474 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Yohei Yamazawa, Justin Moses, Chelsea DuBose, Michael Hummel | 2023-03-07 |