Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728135 | Electric pressure systems for control of plasma properties and uniformity | Jianping Zhao, Merritt Funk, Zhiying Chen | 2023-08-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728135 | Electric pressure systems for control of plasma properties and uniformity | Jianping Zhao, Merritt Funk, Zhiying Chen | 2023-08-15 |