Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798787 | Plasma processing apparatus and plasma processing method | Naoki Fujiwara, Mitsunori Ohata | 2023-10-24 |
| 11756767 | Plasma processing apparatus and plasma processing method | Ken Kobayashi | 2023-09-12 |