Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832373 | Plasma processing apparatus | Yohei Yamazawa, Takehisa Saito, Mayo UDA, Alok Ranjan, Toshiki Nakajima | 2023-11-28 |
| 11562889 | Plasma processing apparatus and gas introducing method | Mayo UDA, Manabu Tsuruta | 2023-01-24 |