Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804379 | Etching method and plasma processing apparatus | Taku Gohira | 2023-10-31 |
| 11749508 | Plasma processing method | Yuya Minoura, Taku Gohira | 2023-09-05 |
| 11728176 | Treatment method | Kiyohito Ito, Shinya Morikita, Kensuke Taniguchi, Masanobu Honda | 2023-08-15 |
| 11699614 | Film deposition method and plasma processing apparatus | Masanobu Honda | 2023-07-11 |