Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749508 | Plasma processing method | Michiko Nakaya, Taku Gohira | 2023-09-05 |
| 11688609 | Etching method and plasma processing apparatus | — | 2023-06-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749508 | Plasma processing method | Michiko Nakaya, Taku Gohira | 2023-09-05 |
| 11688609 | Etching method and plasma processing apparatus | — | 2023-06-27 |