Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804379 | Etching method and plasma processing apparatus | Michiko Nakaya | 2023-10-31 |
| 11749508 | Plasma processing method | Michiko Nakaya, Yuya Minoura | 2023-09-05 |
| 11631590 | Substrate processing method, substrate processing apparatus and cleaning apparatus | Muneyuki Omi, Takahiro Murakami | 2023-04-18 |