Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631590 | Substrate processing method, substrate processing apparatus and cleaning apparatus | Muneyuki Omi, Taku Gohira | 2023-04-18 |
| 11548827 | Member for plasma processing apparatus and plasma processing apparatus with the same | Takashi Ikeda, Hajime Ishii, Kenji Fujimoto, Naoyuki Satoh, Nobuyuki Nagayama +1 more | 2023-01-10 |