Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11548827 | Member for plasma processing apparatus and plasma processing apparatus with the same | Takashi Ikeda, Kenji Fujimoto, Naoyuki Satoh, Nobuyuki Nagayama, Koichi Murakami +1 more | 2023-01-10 |