Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676847 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Tatsuo Nishita | 2023-06-13 |
| 11548827 | Member for plasma processing apparatus and plasma processing apparatus with the same | Takashi Ikeda, Hajime Ishii, Kenji Fujimoto, Nobuyuki Nagayama, Koichi Murakami +1 more | 2023-01-10 |