Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676847 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Naoyuki Satoh | 2023-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676847 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Naoyuki Satoh | 2023-06-13 |