Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728166 | Substrate processing method and substrate processing apparatus | Maju TOMURA, Yoshihide Kihara, Hironari Sasagawa | 2023-08-15 |
| 11637025 | Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxide | Masahiro Tabata | 2023-04-25 |
| 11574806 | Film forming method | Masahiro Tabata | 2023-02-07 |