Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810791 | Etching method, substrate processing apparatus, and substrate processing system | Hironari Sasagawa | 2023-11-07 |
| 11798793 | Substrate processing method, component processing method, and substrate processing apparatus | Satoshi OHUCHIDA, Koki MUKAIYAMA, Yusuke WAKO, Yoshihide Kihara | 2023-10-24 |
| 11728166 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Yoshihide Kihara, Hironari Sasagawa | 2023-08-15 |
| 11637003 | Method for etching film and plasma processing apparatus | Tomohiko NIIZEKI, Takayuki Katsunuma, Yoshihide Kihara | 2023-04-25 |
| 11615964 | Etching method | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-03-28 |
| 11600501 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-03-07 |
| 11551937 | Etching method | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-01-10 |