Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11637003 | Method for etching film and plasma processing apparatus | Takayuki Katsunuma, Yoshihide Kihara, Maju TOMURA | 2023-04-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11637003 | Method for etching film and plasma processing apparatus | Takayuki Katsunuma, Yoshihide Kihara, Maju TOMURA | 2023-04-25 |