Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664236 | Method of etching film and plasma processing apparatus | — | 2023-05-30 |
| 11637003 | Method for etching film and plasma processing apparatus | Tomohiko NIIZEKI, Yoshihide Kihara, Maju TOMURA | 2023-04-25 |
| 11617830 | Medical pump, method of controlling medical pump, and medical pump system | — | 2023-04-04 |