Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615964 | Etching method | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2023-03-28 |
| 11600501 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2023-03-07 |
| 11551937 | Etching method | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2023-01-10 |