Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11824472 | Motor drive apparatus and cooling apparatus | Takayuki Miyajima, Tetsuo Nakata, Junpei YAMAMOTO | 2023-11-21 |
| 11750131 | Motor drive method and motor drive apparatus | Takayuki Miyajima | 2023-09-05 |
| 11736050 | Motor drive method and motor drive apparatus | Takayuki Miyajima | 2023-08-22 |
| 11710644 | Etching method and plasma processing apparatus | Taihei MATSUHASHI, Masanori Hosoya, Hiroie Matsumoto | 2023-07-25 |
| 11615964 | Etching method | Maju TOMURA, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-03-28 |
| 11600501 | Etching method and plasma processing apparatus | Maju TOMURA, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-03-07 |
| 11551937 | Etching method | Maju TOMURA, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2023-01-10 |