Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11710643 | Method of etching and plasma processing apparatus | Mitsuhiro Iwano | 2023-07-25 |
| 11710644 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Taihei MATSUHASHI, Hiroie Matsumoto | 2023-07-25 |