Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810791 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA | 2023-11-07 |
| 11728166 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Maju TOMURA, Yoshihide Kihara | 2023-08-15 |