Issued Patents 2023
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830704 | Plasma processing apparatus and control method | Shin Hirotsu | 2023-11-28 |
| 11804368 | Cleaning method and plasma processing apparatus | — | 2023-10-31 |
| 11772138 | Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method | Kazuya Dobashi | 2023-10-03 |
| 11764082 | Control method and plasma processing apparatus | Shinji Kubota, Koji Maruyama, Takashi Dokan, Koichi Nagami | 2023-09-19 |
| 11764034 | Plasma processing method and plasma processing apparatus | Shin Hirotsu, Takenobu Ikeda, Koichi Nagami, Shinji Himori | 2023-09-19 |
| 11742183 | Plasma processing apparatus and control method | Ryuji Hisatomi, Michishige Saito | 2023-08-29 |
| 11742180 | Plasma processing method and plasma processing apparatus | — | 2023-08-29 |
| 11742181 | Control method and plasma processing apparatus | Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-08-29 |
| 11742182 | Control method and plasma processing apparatus | Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-08-29 |
| 11742184 | Plasma processing apparatus and plasma processing method | — | 2023-08-29 |
| 11664196 | Detecting method and plasma processing apparatus | — | 2023-05-30 |
| 11581170 | Plasma processing apparatus and processing method | Shinji Kubota, Yuji Aota | 2023-02-14 |
| 11574798 | Plasma processing apparatus and control method | Shin Hirotsu | 2023-02-07 |
| 11562887 | Plasma processing apparatus and etching method | — | 2023-01-24 |