YA

Yuji Aota

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
📍 Rifu, JP: #106 of 296 inventorsTop 40%
Overall (2023): #191,103 of 537,848Top 40%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11581170 Plasma processing apparatus and processing method Shinji Kubota, Chishio Koshimizu 2023-02-14