Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742181 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-08-29 |
| 11742182 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-08-29 |