Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764082 | Control method and plasma processing apparatus | Chishio Koshimizu, Shinji Kubota, Takashi Dokan, Koichi Nagami | 2023-09-19 |
| 11742181 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Takashi Dokan | 2023-08-29 |
| 11742182 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Takashi Dokan | 2023-08-29 |