Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776795 | Plasma processing apparatus and power supply control method | Tatsuro Ohshita | 2023-10-03 |
| 11764034 | Plasma processing method and plasma processing apparatus | Chishio Koshimizu, Shin Hirotsu, Takenobu Ikeda, Shinji Himori | 2023-09-19 |
| 11764082 | Control method and plasma processing apparatus | Chishio Koshimizu, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2023-09-19 |
| 11646181 | Plasma processing apparatus and plasma processing method | Natsumi TORII | 2023-05-09 |
| 11594398 | Apparatus and method for plasma processing | Yusuke Aoki, Fumiya TAKATA, Toshikatsu TOBANA, Shinya Morikita, Kazunobu Fujiwara +1 more | 2023-02-28 |