Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764034 | Plasma processing method and plasma processing apparatus | Chishio Koshimizu, Shin Hirotsu, Koichi Nagami, Shinji Himori | 2023-09-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764034 | Plasma processing method and plasma processing apparatus | Chishio Koshimizu, Shin Hirotsu, Koichi Nagami, Shinji Himori | 2023-09-19 |