Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830704 | Plasma processing apparatus and control method | Chishio Koshimizu | 2023-11-28 |
| 11764034 | Plasma processing method and plasma processing apparatus | Chishio Koshimizu, Takenobu Ikeda, Koichi Nagami, Shinji Himori | 2023-09-19 |
| 11574798 | Plasma processing apparatus and control method | Chishio Koshimizu | 2023-02-07 |