SH

Shinji Himori

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
📍 Rifu, JP: #106 of 296 inventorsTop 40%
Overall (2023): #257,933 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11764034 Plasma processing method and plasma processing apparatus Chishio Koshimizu, Shin Hirotsu, Takenobu Ikeda, Koichi Nagami 2023-09-19