Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772138 | Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method | Chishio Koshimizu | 2023-10-03 |
| 11761075 | Substrate cleaning apparatus | Yukimasa Saito, Toshiki HINATA, Kyoko Ikeda, Shuji Moriya | 2023-09-19 |
| 11694872 | Pattern enhancement using a gas cluster ion beam | Hiromitsu Kambara, Masaru Nishino, Reo Kosaka, Matthew C. Gwinn, Luis Fernandez +3 more | 2023-07-04 |